WClasses
MTE 545 - Introduction to MEMS Fabrication
Introduction to MEMS. Fabrication processes for MEMS devices. Basic MEMS governing equations in different energy domains (mechanical, electrical, and thermal). Methods for layout, design, and modelling of MEMS devices. Simulation techniques. Techniques for testing and characterization of MEMS devices.
Prerequisites
Level at least 3B Biomedical, Computer, Electrical, Mechanical, Mechatronics, or Systems Design Engineering
Corequisites
None
Antirequisites
None
Offerings
Fall 2025 [1259]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5624 | 31 / 30 | 12:30 - 13:20 | M,W,F |
Fall 2022 [1229]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5617 | 26 / 30 | 12:30 - 13:20 | M,W,F | DWE 2402 | Patricia Nieva |
Fall 2021 [1219]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5477 | 34 / 30 | 13:30 - 14:20 | M,W,F | DWE 2402 | Abdul Ghannoum |
| LEC 002 | 8797 | 7 / 8 | 13:30 - 14:20 | M,W,F | Patricia Nieva |
Fall 2020 [1209]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 041 | 5510 | 29 / 30 | 13:30 - 14:20 | M,W,F | Patricia Nieva |
Fall 2019 [1199]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 9126 | 24 / 30 | 13:30 - 14:20 | M,W | CPH 3679 | Abdul Ghannoum |
Spring 2019 [1195]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5554 | 0 / 30 |
Fall 2018 [1189]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 4880 | 35 / 30 | 13:30 - 14:20 | M | CPH 3679 | Patricia Nieva |
Fall 2017 [1179]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5061 | 31 / 30 | 13:30 - 14:20 | M,W,F | CPH 3679 | Patricia Nieva |
Fall 2016 [1169]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5114 | 30 / 30 | 13:30 - 14:20 | M,W,F | CPH 3679 | Patricia Nieva |
Fall 2015 [1159]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5439 | 33 / 30 | 13:30 - 14:20 | M,W | CPH 3679 | Patricia Nieva |
Fall 2014 [1149]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 7634 | 9 / 30 | 13:30 - 14:20 | M,W,F | CPH 3679 | Patricia Nieva |
Fall 2012 [1129]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 4692 | 26 / 30 | 17:30 - 18:20 | M | AL 105 | Patricia Nieva |
Fall 2011 [1119]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 7234 | 21 / 30 | 17:30 - 18:20 | M | CPH 3679 | Patricia Nieva |