WClasses
ECE 433 - Fabrication Technologies for Micro and Nano Devices
Processes for micro and nanoelectronic fabrication. Semiconductor crystal growth. Thin films by chemical and physical vapor deposition. Epitaxial growth. Plasma-assisted and wet-chemical etch processes. Nano-structured material synthesis. Junction formation. Dielectric layer growth. Photolithography. Patterning on the nanoscale. Fabrication processes for transistors, complementary metal-oxide semiconductor (CMOS), and thin film devices. Micro-electro-mechanical systems (MEMS) technology. Process techniques for nanoelectronic devices.
Prerequisites
ECE109; Level at least 4A Computer Engineering or Electrical Engineering.
Corequisites
None
Antirequisites
NE343
Offerings
Spring 2024 [1245]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LAB 201 | 3489 | 4 / 20 | ||||
| LEC 001 | 3326 | 4 / 20 | 14:30 - 15:50 | W,Th | ||
| TUT 101 | 3327 | 4 / 20 | 14:30 - 15:20 | F |
Spring 2023 [1235]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LAB 201 | 3624 | 5 / 15 | ||||
| LEC 001 | 3387 | 5 / 15 | 14:30 - 15:50 | M,W | ||
| TUT 101 | 3388 | 5 / 15 | 12:30 - 13:20 | F |
Spring 2022 [1225]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LAB 201 | 5959 | 0 / 15 | ||||
| LEC 001 | 3399 | 6 / 15 | 15:00 - 16:20 | W,F | QNC 2502 | Bahareh Sadeghimakki |
| TUT 101 | 3400 | 6 / 15 | 16:30 - 17:20 | T | QNC 2502 |
Spring 2021 [1215]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 041 | 3155 | 6 / 40 | 15:00 - 16:20 | W,F | Bo Cui |
Spring 2020 [1205]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 3431 | 1 / 20 | Chettypalayam Selvakumar | |||
| TUT 101 | 3432 | 1 / 20 |
Spring 2019 [1195]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5137 | 4 / 20 | 16:00 - 17:20 | T | E7 4043 | Siva Sivoththaman |
| TUT 101 | 5138 | 4 / 20 | 16:30 - 17:20 | Th | E7 4433 |
Winter 2019 [1191]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 7830 | 0 / 6 | ||||
| TUT 101 | 8484 | 0 / 1 | 17:30 - 18:20 | F | E5 5128 |
Winter 2017 [1171]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 4814 | 14 / 20 | 11:30 - 12:20 | M,W,F | EIT 3145 | Siva Sivoththaman |
| TUT 101 | 4827 | 14 / 20 | 16:30 - 17:20 | F | EIT 3145 |
Fall 2016 [1169]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 9321 | 1 / 1 |
Winter 2016 [1161]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5417 | 10 / 15 | 11:30 - 12:20 | M,W,F | RCH 208 | William S. Wong |
| TUT 101 | 5431 | 10 / 15 | 16:30 - 17:20 | F | RCH 209 |
Winter 2015 [1151]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 5269 | 22 / 30 | 14:30 - 15:20 | M,W,F | PHY 150 | Siva Sivoththaman |
| TUT 101 | 5288 | 22 / 30 | 17:30 - 18:20 | F | RCH 209 |
Winter 2014 [1141]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LEC 001 | 7646 | 23 / 30 | 16:00 - 17:20 | T,Th | B2 350 | Siva Sivoththaman |
| TUT 101 | 7890 | 23 / 30 | 16:30 - 17:20 | W | RCH 209 |
Winter 2012 [1121]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LAB 201 | 4567 | 18 / 35 | ||||
| LEC 001 | 4550 | 18 / 35 | 08:30 - 09:20 | M,W,F | E5 4106 | Chettypalayam R Selvakumar |
| TUT 101 | 4551 | 18 / 35 | 13:30 - 14:20 | M | E5 4106 |
Winter 2011 [1111]
| Section | Class | Enrolled | Time | Days | Location | Instructor |
|---|---|---|---|---|---|---|
| LAB 201 | 7219 | 21 / 80 | ||||
| LEC 001 | 7201 | 21 / 80 | 12:30 - 13:20 | M,W,F | RCH 309 | Bo Cui |
| TUT 101 | 7202 | 21 / 80 | 16:30 - 17:20 | W | RCH 309 |